Proceedings of the 2012 National Conference on Information Technology and Computer Science

Research on the Measurement of Displacement based on Grating Reticle Image

Authors
Hai-hua LI, Juan Fan
Corresponding Author
Hai-hua LI
Available Online November 2012.
DOI
https://doi.org/10.2991/citcs.2012.162How to use a DOI?
Keywords
displacement measurement; grating; image processing; Lissajous figure; AC servo motor
Abstract
A new method is present to get movement displacement directly when applying grating reticle to AC servo driving control system to carry on high precise orientation for the micro-objects. Adjusting the optical path until grating reticle image can be gathered clearly by vidicon. After analyzing and processing the grating reticle image collected by vidicon, the mapping coefficient can be accurately calculated between grid width and pixels. Comparing the fore-and-aft two grating reticle images after the worktable moved. The phase difference of two images can be figured out by phase difference ratio arithmetic based on Lissajous figures. Accordingly the actual displacement of the worktable can be calculated by the mapping coefficient. The experiments show that this method can implement sub-pixel measurement easily and rapidly in micro electronics manufacture.
Open Access
This is an open access article distributed under the CC BY-NC license.

Download article (PDF)

Proceedings
2012 National Conference on Information Technology and Computer Science
Part of series
Advances in Intelligent Systems Research
Publication Date
November 2012
ISBN
978-94-91216-39-8
ISSN
1951-6851
DOI
https://doi.org/10.2991/citcs.2012.162How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Hai-hua LI
AU  - Juan Fan
PY  - 2012/11
DA  - 2012/11
TI  - Research on the Measurement of Displacement based on Grating Reticle Image
BT  - 2012 National Conference on Information Technology and Computer Science
PB  - Atlantis Press
SP  - 631
EP  - 634
SN  - 1951-6851
UR  - https://doi.org/10.2991/citcs.2012.162
DO  - https://doi.org/10.2991/citcs.2012.162
ID  - LI2012/11
ER  -