Research on the Measurement of Displacement based on Grating Reticle Image
Hai-hua LI, Juan Fan
Available Online November 2012.
- https://doi.org/10.2991/citcs.2012.162How to use a DOI?
- displacement measurement; grating; image processing; Lissajous figure; AC servo motor
- A new method is present to get movement displacement directly when applying grating reticle to AC servo driving control system to carry on high precise orientation for the micro-objects. Adjusting the optical path until grating reticle image can be gathered clearly by vidicon. After analyzing and processing the grating reticle image collected by vidicon, the mapping coefficient can be accurately calculated between grid width and pixels. Comparing the fore-and-aft two grating reticle images after the worktable moved. The phase difference of two images can be figured out by phase difference ratio arithmetic based on Lissajous figures. Accordingly the actual displacement of the worktable can be calculated by the mapping coefficient. The experiments show that this method can implement sub-pixel measurement easily and rapidly in micro electronics manufacture.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Hai-hua LI AU - Juan Fan PY - 2012/11 DA - 2012/11 TI - Research on the Measurement of Displacement based on Grating Reticle Image BT - 2012 National Conference on Information Technology and Computer Science PB - Atlantis Press SP - 631 EP - 634 SN - 1951-6851 UR - https://doi.org/10.2991/citcs.2012.162 DO - https://doi.org/10.2991/citcs.2012.162 ID - LI2012/11 ER -