Study on the Deformation of Pre-Stressed Centre Diaphragm of Pressure Sensor

DOI

10.2991/kam-15.2015.61How to use a DOI?

Keywords

silicon pressure sensor; centre diaphragm; deflection; pre-stress; energy; temperature load.

Abstract

The centre diaphragm is a key part of the silicon piezoresistive pressure sensor with three diaphragms structure which is one major matter to the sensitivity of the output pressure value. The characteristics between the deflection at the center of the circular diaphragm and the pressure loaded on it are considered by applying the energy theory. And the nonlinear deflection and the maximal deflection formulas are derived by taking the outside pressure loaded and the pre-stress into account. The simulation of the large deflection of the diaphragm is developed by the ANSYS finite-element-method (FEM) software. And the pre-stress is loaded by applying temperature loads in the APDL module. Additionally, the maximal deflection of the centre diaphragm is measured by the micro displacement test equipment. And the testing results confirm both the correction of mathematical model and the validity of the ANSYS FEM simulation software. The results indicated that the pre-stress affect the deflection of the diaphragm of pressure sensor obviously and should not be ignored.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Download article (PDF)

TY  - CONF
AU  - He Shenzhi
AU  - Hu Guoqing
AU  - Zhou Yonghong
AU  - Wang Jianling
AU  - Zou Chong
AU  - Alam SM Jahangir
PY  - 2015/06
DA  - 2015/06
TI  - Study on the Deformation of Pre-Stressed Centre Diaphragm of Pressure Sensor
BT  - Proceedings of the 5th International Symposium on Knowledge Acquisition and Modeling
PB  - Atlantis Press
SP  - 223
EP  - 225
SN  - 1951-6851
UR  - https://doi.org/10.2991/kam-15.2015.61
DO  - 10.2991/kam-15.2015.61
ID  - Shenzhi2015/06
ER  -