Proceedings of the 4th 2016 International Conference on Material Science and Engineering (ICMSE 2016)

Monolithic Pyroelectric Infrared Sensor Array with Porous SiO2 Film

Authors
Xiang-Yu Sun, Wen-Bo Luo, Xin-Qiang Pan, Xiao-Yuan Bai, Jia Meng, Yao Shuai, Chuan-Gui Wu
Corresponding Author
Xiang-Yu Sun
Available Online December 2016.
DOI
10.2991/icmse-16.2016.86How to use a DOI?
Keywords
Porous thermal Insulator, Dense SiO2 film, Property uniformity
Abstract

A simple method to fabricate pyroelectric sensors array using standard semiconductor process on Silicon substrate was investigated. 600 nm porous SiO2 film was prepared by spin coating, working as ultra-thin thermal insulator. Good insulation property was achieved owing to its extremely low thermal conductance. A dense SiO2 layer was made above porous film and provided a smooth surface for sensor fabrication process. Square sensor units of five different sizes from 0.01 mm2 to 2.25 mm2 were produced by photolithography and wet etching. The pyroelectric coefficients of these units were in the range of 2.5ž10-9 Ccm-2K-1 to 3.5ž10-9 Ccm-2K-1. Different sensor units showed similar infrared detective performance at frequency range from 5 Hz to 100 Hz. The excellent directivities were capable for applications of next generation infrared array detector.

Copyright
© 2016, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 4th 2016 International Conference on Material Science and Engineering (ICMSE 2016)
Series
Advances in Engineering Research
Publication Date
December 2016
ISBN
10.2991/icmse-16.2016.86
ISSN
2352-5401
DOI
10.2991/icmse-16.2016.86How to use a DOI?
Copyright
© 2016, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Xiang-Yu Sun
AU  - Wen-Bo Luo
AU  - Xin-Qiang Pan
AU  - Xiao-Yuan Bai
AU  - Jia Meng
AU  - Yao Shuai
AU  - Chuan-Gui Wu
PY  - 2016/12
DA  - 2016/12
TI  - Monolithic Pyroelectric Infrared Sensor Array with Porous SiO2 Film
BT  - Proceedings of the 4th 2016 International Conference on Material Science and Engineering (ICMSE 2016)
PB  - Atlantis Press
SP  - 516
EP  - 521
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmse-16.2016.86
DO  - 10.2991/icmse-16.2016.86
ID  - Sun2016/12
ER  -