A summary of the current development of developing technology in the field of integrated circuit manufacturing
Xue-Ping Liu, Qiang Xu, Feng Ning, Han Wang
Available Online April 2015.
- https://doi.org/10.2991/icmra-15.2015.256How to use a DOI?
- Developing technology; Developing nozzle; Developing process; Trend
- Developing technology is critical for the lithography technology in the field of integrated circuit (IC). The developing nozzle and process are the "hard” and "soft" technology, respectively. It is the continuous improvement and innovation of developing nozzle and process that drive the rapid development of lithography technology and IC technology, and promote the reform of information technology. In this paper, we emphatically introduce the development status of developing nozzle and process, and put forward the development trend of developing technology based on the current situation of IC technology in China.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Xue-Ping Liu AU - Qiang Xu AU - Feng Ning AU - Han Wang PY - 2015/04 DA - 2015/04 TI - A summary of the current development of developing technology in the field of integrated circuit manufacturing BT - Proceedings of the 3rd International Conference on Mechatronics, Robotics and Automation PB - Atlantis Press SP - 1333 EP - 1340 SN - 2352-538X UR - https://doi.org/10.2991/icmra-15.2015.256 DO - https://doi.org/10.2991/icmra-15.2015.256 ID - Liu2015/04 ER -