Coulomb Interactions in a Focused Ion Beam System with a Dynamic Corrected Deflection Field

DOI

10.2991/icmii-15.2015.62How to use a DOI?

Keywords

Coulomb interactions; dynamic correction; three-dimension ion trajectory

Abstract

Focused ion beam systems complement conventional processing methods and can be used to prototype and modify a diverse range of nano-devices and sensors. Controllable incident focused ion beam is difficult to obtain due to Coulomb interactions among ions. In this paper, Coulomb interactions of a practical FIB system with a dynamic corrected deflection field are obtained through solving Newton-Lorentz equations in three-dimension (3D). Firstly, the principle of the dynamic correction is analyzed and its 3D realization is given. Secondly, the principle of N-body Monte Carlo method is researched in detail before the source parameter, the 3D field, and the number of N are determined. In the end, the equations are solved by fifth-order Runge-Kutta algorithm and 3D ion trajectory is given for a 30kV FIB through the Mebs software. Simulation results coincide to the experimental those from our Canion 31+ system.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Wenping Li
AU  - Qian Li
AU  - Junbiao Liu
PY  - 2015/10
DA  - 2015/10
TI  - Coulomb Interactions in a Focused Ion Beam System with a Dynamic Corrected Deflection Field
BT  - Proceedings of the 3rd International Conference on Mechatronics and Industrial Informatics
PB  - Atlantis Press
SP  - 340
EP  - 344
SN  - 2352-538X
UR  - https://doi.org/10.2991/icmii-15.2015.62
DO  - 10.2991/icmii-15.2015.62
ID  - Li2015/10
ER  -