Structure and Space Charge Inhibition Performance of Reactive RF Magnetron Sputter Deposited Al2O3 Thin Film on the Fiber Surface

DOI

10.2991/icmea-17.2018.1How to use a DOI?

Keywords

nano-structure Al2O3 film; magnetron sputtering; cellulose insulation pressboard; space charge; inhibition performance

Abstract

Cellulose insulation paper/pressboard has been widely used in HVDC transformers. In this study, the aluminum oxide function film was deposited on the cellulose insulation pressboard surface using reactive radio frequency (RF) magnetron sputtering. The sputtered thin film was characterized by the scanning electron microscopy (SEM) and the X-ray photoelectron spectroscopy (XPS). The influence of the deposited function film on the space charge injection/accumulation behavior was investigated. SEM and XPS results show that the nano-structured Al2O3 film was successfully fabricated on the fiber surface. The oil impregnated sputtered pressboard presents apparent space charge suppression effect. The obtained band gap energy (Eg) of Al2O3 is 7.39 eV. The nano-structured Al2O3 film introduces a new trap band which is helpful for the charge inhibition.

Copyright

© 2018, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Jian Hao
AU  - Yanqing Li
AU  - Ruijin Liao
AU  - Chao Li
AU  - Lianpeng Wang
AU  - Shuaiwei Liang
PY  - 2018/02
DA  - 2018/02
TI  - Structure and Space Charge Inhibition Performance of Reactive RF Magnetron Sputter Deposited Al2O3 Thin Film on the Fiber Surface
BT  - Proceedings of the 4th Annual International Conference on Material Engineering and Application (ICMEA 2017)
PB  - Atlantis Press
SP  - 1
EP  - 5
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmea-17.2018.1
DO  - 10.2991/icmea-17.2018.1
ID  - Hao2018/02
ER  -