Study on the Deformation and the Test of the Electrostatic Driven MEMS Flexible-Beam

DOI

10.2991/icmce-14.2014.53How to use a DOI?

Keywords

Electrostatic Driven, Flexible Beam, Deformation, Pull-in, Test

Abstract

Based on the theory about the electrostatic, the non-uniformly distributed load and the coupling between the electrostatic force and the deformation of the flexible beam are considered, the deformation analysis of the electrostatic driven flexible beam is done, the mathematic model about the deformation of the flexible beam under different driven voltage is established and the equation for calculating the pull-in voltage is given. The flexible beam is designed and machined, its deformation are analyzed with the above method and model. The test system is built, the deformation of the flexible beam under different driven voltage and the pull-in voltage are tested, which contrasted with the theoretical results. The validity of the mathematic model above is proved.

Copyright

© 2014, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Download article (PDF)

TY  - CONF
AU  - Qing-Ling LIU
PY  - 2014/12
DA  - 2014/12
TI  - Study on the Deformation and the Test of the Electrostatic Driven MEMS Flexible-Beam
BT  - Proceedings of the 2014 International Conference on Mechanics and Civil Engineering
PB  - Atlantis Press
SP  - 299
EP  - 304
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmce-14.2014.53
DO  - 10.2991/icmce-14.2014.53
ID  - LIU2014/12
ER  -