Study on Laser Micro-Cladding Integrated Circuit Manufacturing Equipment Control System

DOI

10.2991/cisia-15.2015.64How to use a DOI?

Keywords

micro-cladding; AT89S52; galvanometer; Q-switching; closed-loop control

Abstract

Among the micro-cladding integrated circuit-based manufacturing equipment, we use closed-loop control of the laser output control unit to precisely control the laser power and change the power of the laser beam. Equipment adopt galvanometer control card and AT89S52. Method of communication using RS232 serial communication, using Time To Live (TTL) level to control the Q-switching through Computer numerical control (CNC) adjustable external control mode. Real-time acquisition of power of the laser beam and timely feedback, and then adjusting the laser power output current size, repeat feedback regulation, until the laser output power reaches the target accurately.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - T. Wang
AU  - D.Z Zhao
AU  - F.Z Li
AU  - Z. Wang
PY  - 2015/06
DA  - 2015/06
TI  - Study on Laser Micro-Cladding Integrated Circuit Manufacturing Equipment Control System
BT  - Proceedings of the International Conference on Computer Information Systems and Industrial Applications
PB  - Atlantis Press
SP  - 240
EP  - 243
SN  - 2352-538X
UR  - https://doi.org/10.2991/cisia-15.2015.64
DO  - 10.2991/cisia-15.2015.64
ID  - Wang2015/06
ER  -