Study on Laser Micro-Cladding Integrated Circuit Manufacturing Equipment Control System
T. Wang, D.Z Zhao, F.Z Li, Z. Wang
Available Online June 2015.
- 10.2991/cisia-15.2015.64How to use a DOI?
- micro-cladding; AT89S52; galvanometer; Q-switching; closed-loop control
Among the micro-cladding integrated circuit-based manufacturing equipment, we use closed-loop control of the laser output control unit to precisely control the laser power and change the power of the laser beam. Equipment adopt galvanometer control card and AT89S52. Method of communication using RS232 serial communication, using Time To Live (TTL) level to control the Q-switching through Computer numerical control (CNC) adjustable external control mode. Real-time acquisition of power of the laser beam and timely feedback, and then adjusting the laser power output current size, repeat feedback regulation, until the laser output power reaches the target accurately.
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - T. Wang AU - D.Z Zhao AU - F.Z Li AU - Z. Wang PY - 2015/06 DA - 2015/06 TI - Study on Laser Micro-Cladding Integrated Circuit Manufacturing Equipment Control System BT - Proceedings of the International Conference on Computer Information Systems and Industrial Applications PB - Atlantis Press SP - 240 EP - 243 SN - 2352-538X UR - https://doi.org/10.2991/cisia-15.2015.64 DO - 10.2991/cisia-15.2015.64 ID - Wang2015/06 ER -