Proceedings of the 2015 International Conference on Power Electronics and Energy Engineering

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TFT substrate glass geometrical parameter measurement and data processing

Authors
H. Guo
Corresponding Author
H. Guo
Available Online April 2015.
DOI
10.2991/peee-15.2015.35How to use a DOI?
Keywords
TFT glass, Spectral confocal sensor, Measuring platform
Abstract

This paper has analyzed various sensors for the measurement of the TFT substrate glass geometric parameters and ascertain one of optical sensor for this task. The influence of measuring accuracy due to measuring platform has been studied, and then a solution for guarantee high precession measurement has been proposed.

Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 2015 International Conference on Power Electronics and Energy Engineering
Series
Advances in Engineering Research
Publication Date
April 2015
ISBN
978-94-62520-83-7
ISSN
2352-5401
DOI
10.2991/peee-15.2015.35How to use a DOI?
Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

risenwbib
TY  - CONF
AU  - H. Guo
PY  - 2015/04
DA  - 2015/04
TI  - TFT substrate glass geometrical parameter measurement and data processing
BT  - Proceedings of the 2015 International Conference on Power Electronics and Energy Engineering
PB  - Atlantis Press
SP  - 129
EP  - 133
SN  - 2352-5401
UR  - https://doi.org/10.2991/peee-15.2015.35
DO  - 10.2991/peee-15.2015.35
ID  - Guo2015/04
ER  -