Proceedings of the 2021 6th International Conference on Modern Management and Education Technology(MMET 2021)

An Introduction to Lithography Machine

Authors
Xihao Zhang
Corresponding Author
Xihao Zhang
Available Online 12 October 2021.
DOI
10.2991/assehr.k.211011.010How to use a DOI?
Keywords
Integrated circuit industry, Lithography machine, Light source, Operation mode
Abstract

With the rapid advance of industrial intelligent manufacturing and electronic information technology, the importance of integrated circuits keeps increasing. As a fundamental equipment of integrated circuits manufacturing, the lithography machine has become a key research target for researchers around the world. This paper provides a short overview of the lithography technology and lithography machines. Key elements of lithography machines, such as the operation mode, the light source and photoresist, have been focused in this paper. The future development prospect of lithography technology is also summarized.

Copyright
© 2021, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Download article (PDF)

Volume Title
Proceedings of the 2021 6th International Conference on Modern Management and Education Technology(MMET 2021)
Series
Advances in Social Science, Education and Humanities Research
Publication Date
12 October 2021
ISBN
978-94-6239-437-7
ISSN
2352-5398
DOI
10.2991/assehr.k.211011.010How to use a DOI?
Copyright
© 2021, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Xihao Zhang
PY  - 2021
DA  - 2021/10/12
TI  - An Introduction to Lithography Machine
BT  - Proceedings of the 2021 6th International Conference on Modern Management and Education Technology(MMET 2021)
PB  - Atlantis Press
SP  - 49
EP  - 53
SN  - 2352-5398
UR  - https://doi.org/10.2991/assehr.k.211011.010
DO  - 10.2991/assehr.k.211011.010
ID  - Zhang2021
ER  -