An Introduction to Lithography Machine

DOI

10.2991/assehr.k.211011.010How to use a DOI?

Keywords

Integrated circuit industry, Lithography machine, Light source, Operation mode

Abstract

With the rapid advance of industrial intelligent manufacturing and electronic information technology, the importance of integrated circuits keeps increasing. As a fundamental equipment of integrated circuits manufacturing, the lithography machine has become a key research target for researchers around the world. This paper provides a short overview of the lithography technology and lithography machines. Key elements of lithography machines, such as the operation mode, the light source and photoresist, have been focused in this paper. The future development prospect of lithography technology is also summarized.

Copyright

© 2021, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Xihao Zhang
PY  - 2021
DA  - 2021/10/12
TI  - An Introduction to Lithography Machine
BT  - Proceedings of the 2021 6th International Conference on Modern Management and Education Technology（MMET 2021）
PB  - Atlantis Press
SP  - 49
EP  - 53
SN  - 2352-5398
UR  - https://doi.org/10.2991/assehr.k.211011.010
DO  - 10.2991/assehr.k.211011.010
ID  - Zhang2021
ER  -