Reference Vibration analysis of Piezoelectric Micromachined Modal Gyroscope

DOI

10.2991/mmeceb-15.2016.189How to use a DOI?

Keywords

piezoelectric, micro gyroscope, reference vibration, finite element

Abstract

Piezoelectric Micromachined Modal Gyroscope (PMMG) researched in the paper is a novel kind of angular rate sensor, which is based on high order resonant mode of a piezoelectric body as its reference vibration. Three methods, finite element method (FEM), scanning vibrometer and impedance analyzer, were applied to analyze the reference vibration. Reference resonant mode and the modal frequency and modal shape were obtained. Vibrating shape and resonant frequency were visualized and measured through scanning vibrometer equipment. Impedance analyzer was used in the equivalent circuit analysis. Reference vibrating frequencies obtained from mentioned methods are almost same, which are 343.500 kHz, 346.094 kHz and 347.316 kHz respectively. The work of the paper provides the theoretical and experimental foundation for improving performance of PMMG.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Cong Zhao
AU  - Xiao-Sheng Wu
AU  - Guo-Bin Li
AU  - Wen-Yuan Chen
AU  - Wu Liu
AU  - Feng Cui
AU  - Wei-Ping Zhang
PY  - 2015/12
DA  - 2015/12
TI  - Reference Vibration analysis of Piezoelectric Micromachined Modal Gyroscope
BT  - Proceedings of the 2015 2nd International Conference on Machinery, Materials Engineering, Chemical Engineering and Biotechnology
PB  - Atlantis Press
SP  - 940
EP  - 944
SN  - 2352-5401
UR  - https://doi.org/10.2991/mmeceb-15.2016.189
DO  - 10.2991/mmeceb-15.2016.189
ID  - Zhao2015/12
ER  -