The Fabrication of the Microfluidic Device with Micro- and Nano- Scale Channels

DOI

10.2991/mems.2012.164How to use a DOI?

Keywords

microfluidic device; nanochannel

Abstract

Here a simple method for fabrication of the microfluidic device with micro- and nanochannels was developed. The microchannels in micro and nano scales were fabricated on a glass substrate during a two- step process respectively. And then the glass substrate with the microchannels was bonded with another flat glass substrate at room temperature to avoid the collapse of the nanochannels. Standard UV lithography and wet etching were used in this method. The nanochannels with a series of depths were obtained with optimized etchant concentration of 1.5×10-2 mol L-1 HF, 7.5×10-3 mol L-1 HNO3 and 7.5×10-3 mol L-1 NH4F, and the depth had a linear relationship with the etching time (the square of correlation coefficient was 0.9983). The roughness length of the etched nanochannel was 2.045 nm investigated by atomic force microscopy (AFM). The substrate was then bonded with a flat glass plate to form a closed microchannel, the cross-section of the bonded microchannel was imaged by a scanning electron microscopy (SEM). With this method, the microchannels combined with micro and nano scale can be prepared conveniently with low cost.

Copyright

© 2012, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Fu Guangchun
AU  - Zheng Zezhi
AU  - Li Yang
AU  - Chen Hong
PY  - 2012/12
DA  - 2012/12
TI  - The Fabrication of the Microfluidic Device with Micro- and Nano- Scale Channels
BT  - Proceedings of the 1st International Conference on Mechanical Engineering and Material Science (MEMS 2012)
PB  - Atlantis Press
SP  - 627
EP  - 630
SN  - 1951-6851
UR  - https://doi.org/10.2991/mems.2012.164
DO  - 10.2991/mems.2012.164
ID  - Guangchun2012/12
ER  -