Design and development of composite anodic bonding system based on dielectric barrier discharge method
Xufeng Zhao, Mingqiang Pan, Chunyi Lu, Liguo Chen
Available Online May 2014.
- https://doi.org/10.2991/lemcs-14.2014.159How to use a DOI?
- DBD; anodic bonding; plasma; surface treatment; gas discharge
- In this paper, a composite anodic bonding system is developed. In order to reduce the temperature of anodic bonding, DBD(Dielectric barrier discharge)plasma treatment is used. The process of composite anodic bonding is described. The effects and mechanism of the DBD plasma on bond quality are investigated. The functional of composite anodic bonding system is determined. The composite bonding system can be modular constructed by the power supply module, temperature module, motion operation module, visual detection module. When the temperature is 300 ,the DBD Voltage is 1200v, frequency is 20KHz, interspace is 2 mm, glow-like plasmas is generated at atmospheric pressure, and bonding quality is best. DBD treatment can reduce the bonding temperature is proved through experiment.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Xufeng Zhao AU - Mingqiang Pan AU - Chunyi Lu AU - Liguo Chen PY - 2014/05 DA - 2014/05 TI - Design and development of composite anodic bonding system based on dielectric barrier discharge method BT - International Conference on Logistics Engineering, Management and Computer Science (LEMCS 2014) PB - Atlantis Press SN - 1951-6851 UR - https://doi.org/10.2991/lemcs-14.2014.159 DO - https://doi.org/10.2991/lemcs-14.2014.159 ID - Zhao2014/05 ER -