Proceedings of the International Conference on Logistics, Engineering, Management and Computer Science

Design and development of composite anodic bonding system based on dielectric barrier discharge method

Authors
Xufeng Zhao, Mingqiang Pan, Chunyi Lu, Liguo Chen
Corresponding Author
Xufeng Zhao
Available Online May 2014.
DOI
https://doi.org/10.2991/lemcs-14.2014.159How to use a DOI?
Keywords
DBD; anodic bonding; plasma; surface treatment; gas discharge
Abstract
In this paper, a composite anodic bonding system is developed. In order to reduce the temperature of anodic bonding, DBD(Dielectric barrier discharge)plasma treatment is used. The process of composite anodic bonding is described. The effects and mechanism of the DBD plasma on bond quality are investigated. The functional of composite anodic bonding system is determined. The composite bonding system can be modular constructed by the power supply module, temperature module, motion operation module, visual detection module. When the temperature is 300 ,the DBD Voltage is 1200v, frequency is 20KHz, interspace is 2 mm, glow-like plasmas is generated at atmospheric pressure, and bonding quality is best. DBD treatment can reduce the bonding temperature is proved through experiment.
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Proceedings
International Conference on Logistics Engineering, Management and Computer Science (LEMCS 2014)
Part of series
Advances in Intelligent Systems Research
Publication Date
May 2014
ISBN
978-94-6252-010-3
ISSN
1951-6851
DOI
https://doi.org/10.2991/lemcs-14.2014.159How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Xufeng Zhao
AU  - Mingqiang Pan
AU  - Chunyi Lu
AU  - Liguo Chen
PY  - 2014/05
DA  - 2014/05
TI  - Design and development of composite anodic bonding system based on dielectric barrier discharge method
BT  - International Conference on Logistics Engineering, Management and Computer Science (LEMCS 2014)
PB  - Atlantis Press
SN  - 1951-6851
UR  - https://doi.org/10.2991/lemcs-14.2014.159
DO  - https://doi.org/10.2991/lemcs-14.2014.159
ID  - Zhao2014/05
ER  -