Nanometric Displacement Measurement System Using Three-Longitudinal-Mode He-Ne Laser

DOI

10.2991/jcis.2006.85How to use a DOI?

Keywords

He-Ne laser, three-longitudinal-mode, stabilized laser, Doppler-interferometry

Abstract

In this paper, design and simulation of a nanometric displacement measurement system is discussed. The combination of the Doppler effect and interferometry method is being used. A stabilized three-longitudinal-mode He-Ne laser with 632.8nm wavelength and 35cm cavity length is used. Its primary and secondary beat frequencies are 428.60MHz, 429.27MHz, and 670kHz, respectively. Therefore, the maximum measurable velocity is equal to 106mm/s.Also, the measuring displacement is limited to the fraction of the synthetic wavelength and its accuracy will be decreased to 0.09nm.

Copyright

© 2006, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Shahram Mohammad Nejad
AU  - Saeed Olyaee
PY  - 2006/10
DA  - 2006/10
TI  - Nanometric Displacement Measurement System Using Three-Longitudinal-Mode He-Ne Laser
BT  - Proceedings of the 9th Joint International Conference on Information Sciences (JCIS-06)
PB  - Atlantis Press
SN  - 1951-6851
UR  - https://doi.org/10.2991/jcis.2006.85
DO  - 10.2991/jcis.2006.85
ID  - MohammadNejad2006/10
ER  -