Proceedings of the 2015 2nd International Workshop on Materials Engineering and Computer Sciences

Process design and simulation of a flexible MEMS array antenna

Authors
Lin Cong, Lixin Xu, Qi Han, Tao Dong
Corresponding Author
Lin Cong
Available Online October 2015.
DOI
10.2991/iwmecs-15.2015.80How to use a DOI?
Keywords
MEMS, LCP, process, simulation.
Abstract

It is important to develop the micro-electro-mechanical system (MEMS) fabrication technology based on polymers. Liquid crystal polymer (LCP) is a suitable substrate for fabricating the flexible MEMS array antenna applied to conforming and bending conditions. This paper presents the metallization process design of the LCP substrate and the patterned process design of the flexible MEMS array antenna. Moreover, by process simulation with the software COVENTOR the process design of the flexible MEMS array antenna has been verified to be feasible.

Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 2015 2nd International Workshop on Materials Engineering and Computer Sciences
Series
Advances in Computer Science Research
Publication Date
October 2015
ISBN
10.2991/iwmecs-15.2015.80
ISSN
2352-538X
DOI
10.2991/iwmecs-15.2015.80How to use a DOI?
Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Lin Cong
AU  - Lixin Xu
AU  - Qi Han
AU  - Tao Dong
PY  - 2015/10
DA  - 2015/10
TI  - Process design and simulation of a flexible MEMS array antenna
BT  - Proceedings of the 2015 2nd International Workshop on Materials Engineering and Computer Sciences
PB  - Atlantis Press
SP  - 398
EP  - 401
SN  - 2352-538X
UR  - https://doi.org/10.2991/iwmecs-15.2015.80
DO  - 10.2991/iwmecs-15.2015.80
ID  - Cong2015/10
ER  -