Preparation and Characteristics of Single Layer Oxide Thin Film

DOI

10.2991/iwmecs-15.2015.71How to use a DOI?

Keywords

oxide film, optical constants, surface roughness, water absorption peak.

Abstract

This This Al2O3, SiO2, Ta2O5, Nb2O5, TiO2 single layer oxide thin film are prepared by using ion beam sputtering deposition technology. The oxide films infrared optical constants are fitted by infrared variable elliptic polarization Angle spectrum instrument (IR - VASE), the results show that the fitting optical constants n, k in line with the material properties. The oxide thin film surface roughness are analyzed by AFM (Nanosurf Easysc -2), and research findings show the compact structure of oxide film and RMS of surface roughness in 0.1 nm, which scattering is smaller.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Xiaolong Zhu
AU  - Jun Xiao
PY  - 2015/10
DA  - 2015/10
TI  - Preparation and Characteristics of Single Layer Oxide Thin Film
BT  - Proceedings of the 2015 2nd International Workshop on Materials Engineering and Computer Sciences
PB  - Atlantis Press
SP  - 357
EP  - 360
SN  - 2352-538X
UR  - https://doi.org/10.2991/iwmecs-15.2015.71
DO  - 10.2991/iwmecs-15.2015.71
ID  - Zhu2015/10
ER  -