The Current Situation and Development Trend of Micro-/nano-sensor and MNPTS

DOI

10.2991/icmmcce-15.2015.458How to use a DOI?

Keywords

Micro-/nano-sensor, MNPTS, MEMS

Abstract

In recent years, with the development of microelectronics technology of mechanical system, micro-/nano-sensor based on micro electro mechanical system (MEMS) technology has been widely used in the field of national defense and civil. Micro-/nano-sensor, especially in the micro air vehicles (MAVs) navigation timing and positioning system has become one of the important direction of development at home and abroad. In this paper, the relationship between MNPTS and MAVs is introduced, the research situation and development trend of micro-/nano-sensor and MNPTS are summarized.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Jinyong Zhu
AU  - Lidong Wang
PY  - 2015/12
DA  - 2015/12
TI  - The Current Situation and Development Trend of Micro-/nano-sensor and MNPTS
BT  - Proceedings of the 4th International Conference on Mechatronics, Materials, Chemistry and Computer Engineering 2015
PB  - Atlantis Press
SP  - 1018
EP  - 1022
SN  - 2352-538X
UR  - https://doi.org/10.2991/icmmcce-15.2015.458
DO  - 10.2991/icmmcce-15.2015.458
ID  - Zhu2015/12
ER  -