Static Analysis of Coupled Micro - beams at both Ends of Electromechanical Coupling

DOI

10.2991/icmeit-17.2017.71How to use a DOI?

Keywords

MEMS, Fixed beam at both ends, The deflection, Thickness.

Abstract

In the micro electro-mechanical system, the electrostatic coupling of the micro-beam at both ends is often used as the driving structure, so it is very important to study the static analysis of the micro-beam structure. The relationship between the geometric structure parameters and the maximum deflection is analyzed by using the Trans coupling unit of Trans126 in ANASYS, and the relationship between the flexural rigidity and the thickness of the micro-beads in the micro electro-mechanical structure is further revealed.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Download article (PDF)

TY  - CONF
AU  - Ning Sun
AU  - Dawei Chen
AU  - Daolin Jiang
PY  - 2017/05
DA  - 2017/05
TI  - Static Analysis of Coupled Micro - beams at both Ends of Electromechanical Coupling
BT  - Proceedings of the 2nd International Conference on Mechatronics Engineering and Information Technology (ICMEIT 2017)
PB  - Atlantis Press
SP  - 365
EP  - 368
SN  - 2352-538X
UR  - https://doi.org/10.2991/icmeit-17.2017.71
DO  - 10.2991/icmeit-17.2017.71
ID  - Sun2017/05
ER  -