Simulation Analysis of Microchannel Deformation during LTCC Warm Water Isostatic Pressing Process

DOI

10.2991/icismme-15.2015.305How to use a DOI?

Keywords

Low Temperature Co-fired Ceramic; Micro-channel deformation; simulation; Abaqus.

Abstract

During the process of warm water isostatic pressing process, the internal micro-channels fabricated in Low Temperature Co-fired Ceramic (LTCC) substrate are prone to collapse. In this paper, a three-dimensional model of LTCC microwave component is established by the finite element software ABAQUS, and the micro-channel deformation is studied by the simulation analysis of warm water isostatic pressing process. Results show that pressure is the main factor that leads to the deformation of micro-channel, and temperature is followed. At the same time, the microchannel with large width-height ratio-aspect ratio has large deformation. Choose smaller pressure 18 MPa and high temperature 80 , microchannel deformation can be controlled below 15%.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Lang Ping
AU  - Zhaohua Wu
PY  - 2015/07
DA  - 2015/07
TI  - Simulation Analysis of Microchannel Deformation during LTCC Warm Water Isostatic Pressing Process
BT  - Proceedings of the First International Conference on Information Sciences, Machinery, Materials and Energy
PB  - Atlantis Press
SP  - 1432
EP  - 1438
SN  - 1951-6851
UR  - https://doi.org/10.2991/icismme-15.2015.305
DO  - 10.2991/icismme-15.2015.305
ID  - Ping2015/07
ER  -