Design and Simulation of Electrostatic Imaging System based on MEMS

DOI

10.2991/icismme-15.2015.38How to use a DOI?

Keywords

electrostatic imaging; MEMS system; finite element analysis

Abstract

The electrostatic imaging system obtains the contour profile of charged target by sensing the electrostatic field around. In this paper, a directional electrostatic imaging system is designed based on MEMS technology. Firstly, an electrostatic imaging MEMS sensor is designed on the principle of directional electrostatic induction and the theory of micro electrostatic field sensor. The direction and sensitivity of the sensor are analyzed by using MAXWELL. Secondly, the imaging array is laid by using the directional electrostatic imaging MEMS sensor as the basic unit, and the imaging results of the imaging array is simulated. The simulation result shows that the imaging array composed by the electrostatic imaging MEMS sensor can effectively fulfill the function of imaging the target. It is also proved that the design of electrostatic imaging system based on MEMS is feasible and can improve the imaging resolution effectively compared with the previous system.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Jing-shu Kang
AU  - Xi Chen
AU  - Kai Tang
AU  - Meng-xuan Li
PY  - 2015/07
DA  - 2015/07
TI  - Design and Simulation of Electrostatic Imaging System based on MEMS
BT  - Proceedings of the First International Conference on Information Sciences, Machinery, Materials and Energy
PB  - Atlantis Press
SP  - 182
EP  - 189
SN  - 1951-6851
UR  - https://doi.org/10.2991/icismme-15.2015.38
DO  - 10.2991/icismme-15.2015.38
ID  - Kang2015/07
ER  -