Simulation and Fabrication of Compounded CMUTs for Medical Application

DOI

10.2991/iceem-15.2015.27How to use a DOI?

Keywords

compounded capacitive micromachined ultrasound transducers; multi-frequency; MEMS; ultrasound; medical application

Abstract

This paper reports a compounded capacitive micromachined ultrasound transducer (CMUT), which has the potential of CMUTs for multi-frequency transducer applications and medical application both imaging and therapy. The compounded CMUT has a cell with low and high-frequency structures. we introduce a fabrication method involving two silicon-on-insulator (SOI) wafers. The performances of CMUTs are strongly dependent on the geometrical properties of the single cells and their arrangement within each element as well. Our devices are modeled using a finite-element package. Finite element simulations about parametric studies are used for analysis, design, and optimization of CMUT cells to predict device performance. Measured deflections show excellent agreement with modeled performance.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Yan Li
AU  - Dawei Zhang
AU  - Peiyu Zhang
PY  - 2015/12
DA  - 2015/12
TI  - Simulation and Fabrication of Compounded CMUTs for Medical Application
BT  - Proceedings of the 2015 International Conference on Electrical, Electronics and Mechatronics
PB  - Atlantis Press
SP  - 108
EP  - 111
SN  - 2352-5401
UR  - https://doi.org/10.2991/iceem-15.2015.27
DO  - 10.2991/iceem-15.2015.27
ID  - Li2015/12
ER  -