Proceedings of the 2015 International Conference on Electrical, Computer Engineering and Electronics

The Ambi-room electric auto-control system of final Optics Assembly

Authors
Liquan Wang, Yukun Jing, Bing Feng, Yong Xiang, Zhongpen Gao
Corresponding Author
Liquan Wang
Available Online June 2015.
DOI
https://doi.org/10.2991/icecee-15.2015.108How to use a DOI?
Keywords
Ambi-room; Final Optics Assembly; Purge Air Sweeping; Target Chamber; integrated optics module (IOM)
Abstract
This control system adopts Siemens S7-400 PLC to realize these functions of monitoring ambi-room pressure by the vacuum gauges and manipulating all vacuum valves in real time etc. The ambi-room control system belonged to unworthy man guard equipments has severe control request of "absolute safety", so that it must ensure safety and credibility in every operation flow: vacuum achievement, input dry clean air, keeping ambi-room pressure, dynamic state purge air sweeping etc. So safety design and manufacture is preferential to any other request, furthermore this idea passes through all control workflow. Because the user mutual interface is very friendly, the manipulation is simple and easy to learn for all assigned operators.
Open Access
This is an open access article distributed under the CC BY-NC license.

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Proceedings
Part of series
Advances in Computer Science Research
Publication Date
June 2015
ISBN
978-94-62520-81-3
ISSN
2352-538X
DOI
https://doi.org/10.2991/icecee-15.2015.108How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Liquan Wang
AU  - Yukun Jing
AU  - Bing Feng
AU  - Yong Xiang
AU  - Zhongpen Gao
PY  - 2015/06
DA  - 2015/06
TI  - The Ambi-room electric auto-control system of final Optics Assembly
PB  - Atlantis Press
SP  - 523
EP  - 526
SN  - 2352-538X
UR  - https://doi.org/10.2991/icecee-15.2015.108
DO  - https://doi.org/10.2991/icecee-15.2015.108
ID  - Wang2015/06
ER  -