The Ambi-room electric auto-control system of final Optics Assembly
Liquan Wang, Yukun Jing, Bing Feng, Yong Xiang, Zhongpen Gao
Available Online June 2015.
- https://doi.org/10.2991/icecee-15.2015.108How to use a DOI?
- Ambi-room; Final Optics Assembly; Purge Air Sweeping; Target Chamber; integrated optics module (IOM)
- This control system adopts Siemens S7-400 PLC to realize these functions of monitoring ambi-room pressure by the vacuum gauges and manipulating all vacuum valves in real time etc. The ambi-room control system belonged to unworthy man guard equipments has severe control request of "absolute safety", so that it must ensure safety and credibility in every operation flow: vacuum achievement, input dry clean air, keeping ambi-room pressure, dynamic state purge air sweeping etc. So safety design and manufacture is preferential to any other request, furthermore this idea passes through all control workflow. Because the user mutual interface is very friendly, the manipulation is simple and easy to learn for all assigned operators.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Liquan Wang AU - Yukun Jing AU - Bing Feng AU - Yong Xiang AU - Zhongpen Gao PY - 2015/06 DA - 2015/06 TI - The Ambi-room electric auto-control system of final Optics Assembly PB - Atlantis Press SP - 523 EP - 526 SN - 2352-538X UR - https://doi.org/10.2991/icecee-15.2015.108 DO - https://doi.org/10.2991/icecee-15.2015.108 ID - Wang2015/06 ER -