Study and Simulation of the Model of Stability Measurement for Integrated Semiconductor Equipment
- 10.2991/iccia.2012.442How to use a DOI?
- Parallel, Integrated Semiconductor Equipment Model of Stability, Simulation
Performance analysis and capacity prediction of integrated semiconductor equipment is a very difficult task, it is a effective way to solve this problem by setting up a model of equipment performance measurement. This paper details the composition and related operation principle of parallel integrated semiconductor equipment. This paper also deriving a set of stability measurement model, we call it Throughput Model, for integrated semiconductor equipment according to its operation principle, which reflect the relationship between stability and output error. The model can effectively calculate the stability of equipment and help system design.
- © 2013, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Fang Xue AU - Qianjun Tang AU - Haifei Wang AU - Yan Zhang AU - Yongju Li PY - 2014/05 DA - 2014/05 TI - Study and Simulation of the Model of Stability Measurement for Integrated Semiconductor Equipment BT - Proceedings of the 2012 2nd International Conference on Computer and Information Application (ICCIA 2012) PB - Atlantis Press SP - 1764 EP - 1766 SN - 1951-6851 UR - https://doi.org/10.2991/iccia.2012.442 DO - 10.2991/iccia.2012.442 ID - Xue2014/05 ER -