Fabrication and Magnetic Properties of FeCoB–O Soft Magnetic Thin Films
- https://doi.org/10.2991/icadme-15.2015.387How to use a DOI?
- Reactive magnetron sputtering, nano-granular film, high frequency characteristics
Thin films of FeCoB-O were deposited by reactive magnetron sputtering in a Ar + O2 atmosphere with the oxygen partial pressure RO2 varied. The dependence of soft magnetic properties and high frequency characteristics on oxygen partial pressure were investigated systematically. With the increase in RO2 from 1.1% to 1.5%, the films exhibited small coercivity Hc and large in-plane uniaxial anisotropy field Hk. A largest Hk value of 70 Oe was obtained for the sample of RO2 = 1.3% with Hc = 7.1 Oe, a saturation magnetization 4 Ms = 10.2 kG and a resistivity = 3638 •cm were consistently obtained, resulting in excellent high frequency characteristics, such as high ferromagnetic resonance frequency of 3.0 GHz combined with a large real part of complex permeability of 145, implying that the film is promising for high frequency applications. Such good soft magnetic properties are ascribed to the exchange coupling among magnetic particles.
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Huaping Zuo AU - Shihui Ge AU - Feng Zhang AU - Guowei Wang AU - Min Xu AU - Lei Zhao PY - 2015/10 DA - 2015/10 TI - Fabrication and Magnetic Properties of FeCoB–O Soft Magnetic Thin Films BT - Proceedings of the 5th International Conference on Advanced Design and Manufacturing Engineering PB - Atlantis Press SP - 2076 EP - 2080 SN - 2352-5401 UR - https://doi.org/10.2991/icadme-15.2015.387 DO - https://doi.org/10.2991/icadme-15.2015.387 ID - Zuo2015/10 ER -