Analysis on a Preparation and Optical performance of Porous Silicon - Based Sensing Materials
- DOI
- 10.2991/wartia-17.2017.8How to use a DOI?
- Keywords
- Porous Silicon; Preparation; Optical performance; Sensing
- Abstract
In the paper, the surface uniform porous silicon thin film material was prepared by using the pulse electrochemical etching method under orthogonal parameters. Analysis of Surface Morphology of Porous Silicon under Atomic Force Microscopy, the optimum preparation conditions were obtained with good optical properties. The optical reflectance spectra of porous silicon films with different porosities were obtained by using the designed porous silicon thin film reflection spectroscopy system, and the refractive index and absorption system spectra were obtained by MATLAB software simulation, which provides the basis for the development and application of porous silicon-based sensing devices.
- Copyright
- © 2017, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Ran Zhang AU - Tiecheng Wang AU - Yonglei Zhao PY - 2017/11 DA - 2017/11 TI - Analysis on a Preparation and Optical performance of Porous Silicon - Based Sensing Materials BT - Proceedings of the 3rd Workshop on Advanced Research and Technology in Industry (WARTIA 2017) PB - Atlantis Press SP - 40 EP - 48 SN - 2352-5401 UR - https://doi.org/10.2991/wartia-17.2017.8 DO - 10.2991/wartia-17.2017.8 ID - Zhang2017/11 ER -