Proceedings of the 2016 6th International Conference on Machinery, Materials, Environment, Biotechnology and Computer

Precision Measurement of Displacement with Two Quasi-Orthogonal Signals for Linear Diffraction Grating Interferometric Sensors

Authors
Jianglin Bi, Shoubin Liu
Corresponding Author
Jianglin Bi
Available Online June 2016.
DOI
10.2991/mmebc-16.2016.5How to use a DOI?
Keywords
Displacement Sensor; Diffraction Grating Interferometry; Signal Subdivision; Phase Difference Measurement
Abstract

Linear diffraction grating interferometer measures displacement via two orthogonal signals generated from the optical outputs of fringes. Due to noises and regulation errors, two signals are not perfect. This paper presents a precision measurement method of displacement for given two non-orthogonal signals. The phase difference of two signals is first calculated by solving an equation derived from correlation principle. The subdivision value is then obtained with a compensation formula. By further counting the cycle number of periodic signal with an amplitude filtering algorithm, accurate value of displacement is outputted. Experimental results show that the proposed method can measure the displacement expressed with two non-orthogonal signals more reliably and accurately.

Copyright
© 2016, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 2016 6th International Conference on Machinery, Materials, Environment, Biotechnology and Computer
Series
Advances in Engineering Research
Publication Date
June 2016
ISBN
978-94-6252-210-7
ISSN
2352-5401
DOI
10.2991/mmebc-16.2016.5How to use a DOI?
Copyright
© 2016, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Jianglin Bi
AU  - Shoubin Liu
PY  - 2016/06
DA  - 2016/06
TI  - Precision Measurement of Displacement with Two Quasi-Orthogonal Signals for Linear Diffraction Grating Interferometric Sensors
BT  - Proceedings of the 2016 6th International Conference on Machinery, Materials, Environment, Biotechnology and Computer
PB  - Atlantis Press
SP  - 25
EP  - 29
SN  - 2352-5401
UR  - https://doi.org/10.2991/mmebc-16.2016.5
DO  - 10.2991/mmebc-16.2016.5
ID  - Bi2016/06
ER  -