Precision Measurement of Displacement with Two Quasi-Orthogonal Signals for Linear Diffraction Grating Interferometric Sensors

DOI

10.2991/mmebc-16.2016.5How to use a DOI?

Keywords

Displacement Sensor; Diffraction Grating Interferometry; Signal Subdivision; Phase Difference Measurement

Abstract

Linear diffraction grating interferometer measures displacement via two orthogonal signals generated from the optical outputs of fringes. Due to noises and regulation errors, two signals are not perfect. This paper presents a precision measurement method of displacement for given two non-orthogonal signals. The phase difference of two signals is first calculated by solving an equation derived from correlation principle. The subdivision value is then obtained with a compensation formula. By further counting the cycle number of periodic signal with an amplitude filtering algorithm, accurate value of displacement is outputted. Experimental results show that the proposed method can measure the displacement expressed with two non-orthogonal signals more reliably and accurately.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Jianglin Bi
AU  - Shoubin Liu
PY  - 2016/06
DA  - 2016/06
TI  - Precision Measurement of Displacement with Two Quasi-Orthogonal Signals for Linear Diffraction Grating Interferometric Sensors
BT  - Proceedings of the 2016 6th International Conference on Machinery, Materials, Environment, Biotechnology and Computer
PB  - Atlantis Press
SP  - 25
EP  - 29
SN  - 2352-5401
UR  - https://doi.org/10.2991/mmebc-16.2016.5
DO  - 10.2991/mmebc-16.2016.5
ID  - Bi2016/06
ER  -