Influence research of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope
Hu Di, Yang Bo, Dai Bo
Available Online December 2015.
- 10.2991/jimet-15.2015.227How to use a DOI?
- silicon micro-gyroscope, fabrication error, amplitude ratio
Influence of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope is present in this paper. Firstly, the structure and operation principle a dual-mass silicon micro-gyroscope is introduced. Then the equation of amplitude ratio between left and right proof mass is deduced. Finally, the simulation analysis of fabrication errors on modal amplitude is implemented. The simulation results show the amplitude ratio is decreased to -1.2741 when the left proof mass error is 5% in anti-phase driving mode. The amplitude ratio is increased to -0.800 when the left stiffness error is 5% in anti-phase sensing mode.
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Hu Di AU - Yang Bo AU - Dai Bo PY - 2015/12 DA - 2015/12 TI - Influence research of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope BT - Proceedings of the 2015 Joint International Mechanical, Electronic and Information Technology Conference PB - Atlantis Press SP - 1199 EP - 1203 SN - 2352-538X UR - https://doi.org/10.2991/jimet-15.2015.227 DO - 10.2991/jimet-15.2015.227 ID - Di2015/12 ER -