Proceedings of the 2016 4th International Conference on Machinery, Materials and Computing Technology

Fabrication of a multilayered optical device based on submicron polyimide film

Authors
Wei Hu, Tianxiang Chen, Yong Chen
Corresponding Author
Wei Hu
Available Online March 2016.
DOI
https://doi.org/10.2991/icmmct-16.2016.178How to use a DOI?
Keywords
polyimide, filter film, space mission, atomic oxygen.
Abstract
A submicron polyimide film (<1μm) with high thickness uniformity was prepared via spin-coating method. Aluminum foil and patterned nickel mesh were sequentially fabricated on the surface of polyimide film using magnetron sputtering and micro-electroforming. Transmittance of the device in UV-vis waveband indicated that the thickness of aluminum plays a dominant important role rather than the other layers. The results of atomic oxygen erosion experiment of the multilayered structure, investigated by ground-based simulation facility, suggests that the Al foil was capable of protecting PI film from atomic oxygen erosion.
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Proceedings
2016 4th International Conference on Machinery, Materials and Computing Technology
Part of series
Advances in Engineering Research
Publication Date
March 2016
ISBN
978-94-6252-165-0
ISSN
2352-5401
DOI
https://doi.org/10.2991/icmmct-16.2016.178How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Wei Hu
AU  - Tianxiang Chen
AU  - Yong Chen
PY  - 2016/03
DA  - 2016/03
TI  - Fabrication of a multilayered optical device based on submicron polyimide film
BT  - 2016 4th International Conference on Machinery, Materials and Computing Technology
PB  - Atlantis Press
SP  - 896
EP  - 900
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmmct-16.2016.178
DO  - https://doi.org/10.2991/icmmct-16.2016.178
ID  - Hu2016/03
ER  -