Fabrication of a multilayered optical device based on submicron polyimide film

DOI

10.2991/icmmct-16.2016.178How to use a DOI?

Keywords

polyimide, filter film, space mission, atomic oxygen.

Abstract

A submicron polyimide film (<1μm) with high thickness uniformity was prepared via spin-coating method. Aluminum foil and patterned nickel mesh were sequentially fabricated on the surface of polyimide film using magnetron sputtering and micro-electroforming. Transmittance of the device in UV-vis waveband indicated that the thickness of aluminum plays a dominant important role rather than the other layers. The results of atomic oxygen erosion experiment of the multilayered structure, investigated by ground-based simulation facility, suggests that the Al foil was capable of protecting PI film from atomic oxygen erosion.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Wei Hu
AU  - Tianxiang Chen
AU  - Yong Chen
PY  - 2016/03
DA  - 2016/03
TI  - Fabrication of a multilayered optical device based on submicron polyimide film
BT  - Proceedings of the 2016 4th International Conference on Machinery, Materials and Computing Technology
PB  - Atlantis Press
SP  - 896
EP  - 900
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmmct-16.2016.178
DO  - 10.2991/icmmct-16.2016.178
ID  - Hu2016/03
ER  -