Proceedings of the 4th International Conference on Information Technology and Management Innovation

<Previous Article In Volume
Next Article In Volume>

Experimental study on air velocity uniformity of Equipment-Fan-Filter units

Authors
Qiuye Zhu, Xinnan Song, Jialuo Shao
Corresponding Author
Qiuye Zhu
Available Online October 2015.
DOI
10.2991/icitmi-15.2015.30How to use a DOI?
Keywords
Clean room; Equipment-fan-filter unit(EFU); Fan-filter unit(FFU); Air velocity uniformity
Abstract

This paper introduces the equipment-fan filter units (EFU) and analyzes the characteristics. Five modules samples of FFU and EFU are tested on the FFU performance test bench. Contrast shows that, there are significant variations of air velocity uniformity between the two, the central-regional velocity profiles of EFUs are worse than FFUs.

Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Download article (PDF)

<Previous Article In Volume
Next Article In Volume>
Volume Title
Proceedings of the 4th International Conference on Information Technology and Management Innovation
Series
Advances in Computer Science Research
Publication Date
October 2015
ISBN
978-94-6252-112-4
ISSN
2352-538X
DOI
10.2991/icitmi-15.2015.30How to use a DOI?
Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

risenwbib
TY  - CONF
AU  - Qiuye Zhu
AU  - Xinnan Song
AU  - Jialuo Shao
PY  - 2015/10
DA  - 2015/10
TI  - Experimental study on air velocity uniformity of Equipment-Fan-Filter units
BT  - Proceedings of the 4th International Conference on Information Technology and Management Innovation
PB  - Atlantis Press
SP  - 164
EP  - 168
SN  - 2352-538X
UR  - https://doi.org/10.2991/icitmi-15.2015.30
DO  - 10.2991/icitmi-15.2015.30
ID  - Zhu2015/10
ER  -