High-precision absolute laser interferometer distance measurement system

DOI

10.2991/iccsee.2013.70How to use a DOI?

Keywords

Absolute distance metrology, high-precision,Tunable laser, Interferometer, Subdivision

Abstract

With the improvement of precision in various fields, we increase high requirements for measurement accuracy. In this paper, we obtain the interference fringes change information (the distance information) with the help of laser scanning with different frequency. This interference method is an absolute measurement. It does not require the target to move in the direction of measurement. In this paper, we give a detailed analysis of the theory. We have done experiments to compare this new method’s results with the results of RENISHAW interferometer. It’s improved that the accuracy of distance measurement is 10-4~10-5 relatively.

Copyright

© 2013, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Chen-yang Zhang
AU  - Shao-lan Zhu
AU  - Hao-dong He
AU  - Bing Li
PY  - 2013/03
DA  - 2013/03
TI  - High-precision absolute laser interferometer distance measurement system
BT  - Proceedings of the 2nd International Conference on Computer Science and Electronics Engineering (ICCSEE 2013)
PB  - Atlantis Press
SP  - 274
EP  - 276
SN  - 1951-6851
UR  - https://doi.org/10.2991/iccsee.2013.70
DO  - 10.2991/iccsee.2013.70
ID  - Zhang2013/03
ER  -