A research on the development of the resolution improvement methods in electron microscopy

DOI

10.2991/iccmcee-15.2015.254How to use a DOI?

Keywords

Electron microscopy, resolution, spherical aberration, chromatic aberration.

Abstract

Influencing factors of electron microscopy spatial resolution and information resolution were reviewed in this paper. The methods to improve the resolution of electron microscopy were discussed from the aspects of choice of electron gun, spherical aberration correction, chromatic aberration correction and high-performance detection device etc. Besides, examples were given to illustrate the effects of the method adopted. Meanwhile, the key method to obtain further resolution of electron microscopy is to work out a corrector compensating the chromatic aberration of the objective lens.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Nana Gao
AU  - LiJing Li
AU  - ZhiHui Tie
AU  - YongQin Wan
PY  - 2015/11
DA  - 2015/11
TI  - A research on the development of the resolution improvement methods in electron microscopy
BT  - Proceedings of the 2015 4th International Conference on Computer, Mechatronics, Control and Electronic Engineering
PB  - Atlantis Press
SP  - 1355
EP  - 1360
SN  - 2352-5401
UR  - https://doi.org/10.2991/iccmcee-15.2015.254
DO  - 10.2991/iccmcee-15.2015.254
ID  - Gao2015/11
ER  -