An Overview of the SOS High Temperature Pressure Sensor

DOI

10.2991/icadme-16.2016.64How to use a DOI?

Keywords

SOS. Silicon on Sapphire. High Temperature Pressure Sensor.

Abstract

SOS (Silicon on Sapphire) high temperature pressure sensor is a kind of strain pressure sensor with high performance. Since the sapphire has excellent properties in chemical stability, corrosion resistance, radiation resistance etc., the SOS high temperature pressure sensors are widely used in the industries of aerospace, ship, automobile, petroleum. In this paper, the technical advantages of SOS high temperature pressure sensor were summarized at first; then the manufacturing process and the research achievements at home and abroad of SOS high temperature pressure sensor were introduces; lastly, the development trend of SOS high temperature pressure sensor was demonstrated.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Xin Li
AU  - Defeng Liu
AU  - Manguo Huang
AU  - Wei Liu
PY  - 2017/07
DA  - 2017/07
TI  - An Overview of the SOS High Temperature Pressure Sensor
BT  - Proceedings of the 2016 6th International Conference on Advanced Design and Manufacturing Engineering (ICADME 2017)
PB  - Atlantis Press
SP  - 393
EP  - 397
SN  - 2352-5401
UR  - https://doi.org/10.2991/icadme-16.2016.64
DO  - 10.2991/icadme-16.2016.64
ID  - Li2017/07
ER  -