Structural, Surface Morphology and Optical Properties of Pulsed Laser Deposited ZnO Thin Films at Various Laser Pulse Energies
- 10.2991/ic3me-15.2015.426How to use a DOI?
- ZnO thin films, pulsed laser deposition, optical properties, laser pulse energy
ZnO thin films have been deposited on ITO substrates by pulsed laser deposition at various laser pulse energies. The crystalline structure, surface morphology and optical properties of ZnO thin films were characterized by X-ray diffraction (XRD), atomic force microscope (AFM) and UV-Visible measurements. The results showed that ZnO thin films grew along with (002) preferential orientation and had optimal crystalline quality when laser pulse energy kept in 180mJ P-1. In addition, the films had smooth surface and compacted structure. Laser pulse energy had little influence on the transmittance of ZnO thin films in visible light region and the transmittance of all the ZnO thin films is above 80%. It also can be found that the film thickness and optical band gap increased with the increase of laser pulse energy from 150mJ P-1 to 200mJ P-1.
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Ying Huang AU - Jia Yuan Qin AU - Xiao Ming Shen AU - Nguyen Manhtai AU - Yue Chun Fu AU - Huan He AU - Shu Long Lu AU - Li Feng Bian PY - 2015/08 DA - 2015/08 TI - Structural, Surface Morphology and Optical Properties of Pulsed Laser Deposited ZnO Thin Films at Various Laser Pulse Energies BT - Proceedings of the 3rd International Conference on Material, Mechanical and Manufacturing Engineering PB - Atlantis Press SP - 2221 EP - 2224 SN - 2352-5401 UR - https://doi.org/10.2991/ic3me-15.2015.426 DO - 10.2991/ic3me-15.2015.426 ID - Huang2015/08 ER -