Proceedings of the 3rd International Conference on Material, Mechanical and Manufacturing Engineering

Thermodynamic analysis and experimental study of TiB2 coatings by CVD

Authors
Xiaoxiao Huang, Shuchen Sun, Shuaidan Lu, Xiaoping Zhu, Kuanhe Li, Ganfeng Tu
Corresponding Author
Xiaoxiao Huang
Available Online August 2015.
DOI
https://doi.org/10.2991/ic3me-15.2015.374How to use a DOI?
Keywords
Thermodynamics; Titanium diboride; Chemical vapor deposition.
Abstract

The coatings of titanium dibordie (TiB2) on a high purity graphite substrate by chemical vapor deposition (CVD) was studied by using a gas mixture of TiCl4, BCl3 and H2. The reaction thermodynamics and the influences of TiCl4: BCl3 flow ratio on the growth rate of TiB2 are analyzed by using HSC software, X-ray diffraction, FESEM and EDS. The experimental results indicate that TiCl4 is according to the theory of gradual dechlorinating in this reaction and a large excess of H2 and TiCl4 can improve the growth rate of TiB2.

Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 3rd International Conference on Material, Mechanical and Manufacturing Engineering
Series
Advances in Engineering Research
Publication Date
August 2015
ISBN
10.2991/ic3me-15.2015.374
ISSN
2352-5401
DOI
https://doi.org/10.2991/ic3me-15.2015.374How to use a DOI?
Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Xiaoxiao Huang
AU  - Shuchen Sun
AU  - Shuaidan Lu
AU  - Xiaoping Zhu
AU  - Kuanhe Li
AU  - Ganfeng Tu
PY  - 2015/08
DA  - 2015/08
TI  - Thermodynamic analysis and experimental study of TiB2 coatings by CVD
BT  - Proceedings of the 3rd International Conference on Material, Mechanical and Manufacturing Engineering
PB  - Atlantis Press
SP  - 1942
EP  - 1947
SN  - 2352-5401
UR  - https://doi.org/10.2991/ic3me-15.2015.374
DO  - https://doi.org/10.2991/ic3me-15.2015.374
ID  - Huang2015/08
ER  -