Research on the Factory Automation Software Based on the SEMI Standard

DOI

10.2991/ic3me-15.2015.129How to use a DOI?

Keywords

IC equipment, SEMI, FA

Abstract

Factory automation (FA) system software is a bridge to realize information exchange between processing equipment of semiconductor equipment and factory host. It receives the control instruction sent by a host, and sends the control instruction to the manufacturing equipment after internal analysis and processing. At the same time, FA receives the real time data and the various process parameters sent by equipment, processes the data, and sends the data to the host. In this paper, analysis of the process of semiconductor processing equipment, according to the actual needs of the semiconductor processing equipment, research on FA Software based on the SEMI standard.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Chenxi Wang
AU  - Mingzhe Liu
AU  - Aidong Xu
AU  - Ni Jin
PY  - 2015/08
DA  - 2015/08
TI  - Research on the Factory Automation Software Based on the SEMI Standard
BT  - Proceedings of the 3rd International Conference on Material, Mechanical and Manufacturing Engineering
PB  - Atlantis Press
SP  - 662
EP  - 665
SN  - 2352-5401
UR  - https://doi.org/10.2991/ic3me-15.2015.129
DO  - 10.2991/ic3me-15.2015.129
ID  - Wang2015/08
ER  -