ZrCoCe Getter Film Solution for Under Controlled Atmosphere MEMS Packaging

DOI

10.2991/aeece-15.2015.40How to use a DOI?

Keywords

Non-evaporable getter; Thin lms; ZrCoCe; DC magnetron sputtering; Sorption property; Vacuum packaging

Abstract

In order to specifically support the technology trend of increased miniaturization of Micro Electro Mechanical Systems (MEMS) devices, highly porous ZrCoCe non-evaporable getter (NEG) film has been produced by DC magnetron sputtering from a preformed ZrCoCe alloy target. The porous film is composed of columnar crystals, which is further built up with assembled ZrCoCe amorphous or nanocrystalline grains. Gas sorption investigation shows that this film can be activated at low temperature and exhibits excellent stable sorption characteristics. Sorption properties can be further improved with elevating the activation temperatures due to the microstructure modification. The capability of ZrCoCe films withstanding wafer physical or chemical cleaning processes is investigated, indicating their compatibility with MEMS vacuum packaging and the appropriate way to store them.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Yaohua Xu
AU  - Jiandong Cui
AU  - Hang Cui
AU  - Hao Zhou
AU  - Zhimin Yang
AU  - Jun Du
PY  - 2015/09
DA  - 2015/09
TI  - ZrCoCe Getter Film Solution for Under Controlled Atmosphere MEMS Packaging
BT  - Proceedings of the International Conference on Advances in Energy, Environment and Chemical Engineering
PB  - Atlantis Press
SP  - 202
EP  - 207
SN  - 2352-5401
UR  - https://doi.org/10.2991/aeece-15.2015.40
DO  - 10.2991/aeece-15.2015.40
ID  - Xu2015/09
ER  -