Nanometric Displacement Measurement System Using Three-Longitudinal-Mode He-Ne Laser
Shahram Mohammad Nejad 0, Saeed Olyaee
Shahram Mohammad Nejad
0Iran Telecommunication Research Center (ITRC) and Iran Unive
Available Online October 2006.
- https://doi.org/10.2991/jcis.2006.85How to use a DOI?
- He-Ne laser, three-longitudinal-mode, stabilized laser, Doppler-interferometry
- In this paper, design and simulation of a nanometric displacement measurement system is discussed. The combination of the Doppler effect and interferometry method is being used. A stabilized three-longitudinal-mode He-Ne laser with 632.8nm wavelength and 35cm cavity length is used. Its primary and secondary beat frequencies are 428.60MHz, 429.27MHz, and 670kHz, respectively. Therefore, the maximum measurable velocity is equal to 106mm/s.Also, the measuring displacement is limited to the fraction of the synthetic wavelength and its accuracy will be decreased to 0.09nm.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Shahram Mohammad Nejad AU - Saeed Olyaee PY - 2006/10 DA - 2006/10 TI - Nanometric Displacement Measurement System Using Three-Longitudinal-Mode He-Ne Laser BT - 9th Joint International Conference on Information Sciences (JCIS-06) PB - Atlantis Press SN - 1951-6851 UR - https://doi.org/10.2991/jcis.2006.85 DO - https://doi.org/10.2991/jcis.2006.85 ID - MohammadNejad2006/10 ER -