Proceedings of the 9th Joint International Conference on Information Sciences (JCIS-06)

Fabrication and characterization of two-dimensional photonic crystal using holographic lithography technology

Authors
Kuo-Chang Lo 0, Mei-Li Hsieh, Yi-Sheng Lan
Corresponding Author
Kuo-Chang Lo
0Institute of Electro-Optical Science and Technology,
Available Online October 2006.
DOI
https://doi.org/10.2991/jcis.2006.311How to use a DOI?
Keywords
photonic crystal, holographic lithography
Abstract
We propose and demonstrate a holographic system using three beams to generate periodic patterns for fabricating photonic crystals. By properly adjusting the incident angle and intensity of three laser beams, the period and structure of interference pattern can be modified. Computer simulation results will be presented and optical holographic system will be constructed. In addition, a simple optical inspection method for real-time examining the structure of photonic crystal will be developed. Optical experimental result will be demonstrated and discussed in this paper.
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Proceedings
9th Joint International Conference on Information Sciences (JCIS-06)
Part of series
Advances in Intelligent Systems Research
Publication Date
October 2006
ISBN
978-90-78677-01-7
ISSN
1951-6851
DOI
https://doi.org/10.2991/jcis.2006.311How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Kuo-Chang Lo
AU  - Mei-Li Hsieh
AU  - Yi-Sheng Lan
PY  - 2006/10
DA  - 2006/10
TI  - Fabrication and characterization of two-dimensional photonic crystal using holographic lithography technology
BT  - 9th Joint International Conference on Information Sciences (JCIS-06)
PB  - Atlantis Press
SN  - 1951-6851
UR  - https://doi.org/10.2991/jcis.2006.311
DO  - https://doi.org/10.2991/jcis.2006.311
ID  - Lo2006/10
ER  -